Ultra-High Q Si3N4 Resonators Q > 100 million


  • Ring resonators and spiral resonators
  • Optical round trip up to 14 meters
  • Bare die or packaged version (fiber pigtail)

Yang He, Long Cheng, Heming Wang, Yu Zhang, Roy Meade, Kerry Vahala, Mian Zhang, and Jiang Li.
"Chip-scale high-performance photonic microwave oscillator." Science Advances 10, no. 33 (2024): eado9570.