Ultra-high Q Si3N4 resonators

Ultra-high Q resonators are critical elements for numerous applications such as on-chip microcomb generation, narrow linewidth lasers, laser frequency stabilization, frequency metrology and bio-sensing. We provide ultra-high Q Si3N4 ring resonators or spiral resonators, with a record high Q factor as high as 330 million, and resonator free spectral range (FSR) from 100 GHz to 10s MHz.

Key Features

  • Ring resonators or spiral resonators based on ultra-low loss Si3N4
  • Optical round-trip for spiral resonators: 0.35 m to > 10 m.
  • Ring resonator FSR: 10 – 100 GHz.
  • Ultra-high Q factor: Q0 over 100 million, up to 330 million
  • bare chip or fiber pigtail packaged version available

Applications

  • Laser frequency stabilization
  • Frequency microcomb generation
  • Bio-sensing
  • Frequency metrology
  • Nonlinear optics
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Ultra-high Q Si3N4 Ring Resonators

Example optical Q factor measurements:

Si3N4 spiral resonator round trip: 14m

Reference

Yang He, Long Cheng, Heming Wang, Yu Zhang, Roy Meade, Kerry Vahala, Mian Zhang, and Jiang Li, "Chip-scale high-performance photonic microwave oscillator." Science Advances 10, no. 33 (2024): eado9570.